Brewer Science Spin Processor

Service Line: 01 Lithography

Spin Processor

The CEE200 is a programmable spin coater for application of resists on the surface of large substrates and piece parts. It has a touch screen user interface for storing a large number of spin recipes. It features a maximum speed of 6000 RPM to an accuracy of +/- 1 RPM. Accessory items included are a programmable exhaust, various spin chuck sizes, EBR, BSR, and an automatic resist dispenser. Bowl inserts can be interchanged for different resist chemistries to minimize contamination.

Specifications:
Maximum spin speed: 6000 RPM
Maximum ramp: 30000 RPM/s
Speed accuracy: +/- 1 RPM
Substrate handling: 200mm maximum
Edge bead removal nozzle
Back side rinse nozzle

Manufacturer: Brewer Science
Model: CEE200

Contact:
Lou Deguzman
704-687-8111
pcdeguzm@charlotte.edu

Tool Location:

Grigg Hall, Third Floor Room: CleanRoom Bay Number: 1