GCA 5X Stepper

Service Line: 01 Lithography

GCA 5X Stepper

• 5X reduction projection lithography tool
• G-Line 436 nm wavelength
• 4″ 1mm thick wafers, silicone and fused silica
• Single wafer chuck

Manufacturer: GCA
Model: 5X

Contact:
Scott Williams
704-687-8126
scotwill@charlotte.edu

Tool Location:

Floor: 3rd Room: CleanRoom Bay: 2