GCA 5X Stepper
Service Line: 01 Lithography
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GCA 5X Stepper
- 5X reduction projection lithography tool
- G-Line 436 nm wavelength
- 4″ 1mm thick wafers, silicone and fused silica
- Single wafer chuck
Manufacturer: GCA
Model: 5X
Contact:
Scott Williams
704-687-8126
scotwill@charlotte.edu
Tool Location:
Floor: 3rd Room: CleanRoom Bay: 2