Rates List
Date Modified: November 1st, 2018
Payment Schedule: University will invoice Client periodically for services performed. The client must pay University within thirty (30) days of the date of the invoice.
Rates List
Tool |
Academic Rate |
Industrial/External Rates |
Notes |
General Cleanroom (Entrance Fee - per person) |
$30/day |
$60/day |
5 Day Cap/Calendar Month |
STS ICP Etching (Si, Oxide, III/V) |
$40/hr |
$80/hr |
1/4hr Minimum Charge. Actual time thereafter. |
STS PECVD (Si02, Si3N4, Oxynitirde |
$50/hr |
$100/hr |
1/4hr Minimum Charge. Actual time thereafter. |
GCA Stepper | $40/hr | $80/hr | 1/4hr Minimum Charge. Actual time thereafter. |
Solaris RTA Thermal Annealer |
$20/hr |
$40/hr |
1/4hr Minimum Charge. Actual time thereafter. |
AJA Sputtering |
$30/hr |
$60/hr |
Noble Metals Extra Charge (Au, Pt, Ag) |
Lesker E-Beam Evaproator |
$30/hr |
$60/hr |
Noble metals extra charge (Au ,Pt, Ag) |
Raith E-Beam System (Writing & Imaging) |
$40/hr |
$80/hr |
1/4hr Minimum Charge. Actual time thereafter. |
Qunitel 4000 Mask Aligner |
$35/hr |
$70/hr |
1/4hr Minimum Charge. Actual time thereafter.* |
K&S Wire Bonder |
$20/hr |
$40/hr |
1/4hr Minimum Charge. Actual time thereafter. |
Loomis Scribe & Break Tool |
$20/hr |
$40/hr |
1/4hr Minimum Charge. Actual time thereafter. |
MicroAutomation 1100 Dicing Saw |
$30/hr |
$60/hr |
1/4hr Minimum Charge. Actual time thereafter.** |
Fintech Flip Chip Bonder |
$20/hr |
$40/hr |
1/4hr Minimum Charge. Actual time thereafter. |
K&S Digital Wedge Bonding System |
$20/hr |
$40/hr |
1/4hr Minimum Charge. Actual time thereafter. |
PANalytical X-Ray Diffractometer (XRD) |
$25/hr |
$50/hr |
1/4hr Minimum Charge. Actual time thereafter. |
JEOL 6400 SEM with EDAX |
$40/hr |
$80/hr |
1/4hr Minimum Charge. Actual time thereafter. |
Dimension 3100 NanoScope AFM |
$20/hr |
$40/hr |
1/4hr Minimum Charge. Actual time thereafter.*** |
Olympus 3D Confocual Microscope |
$15/hr |
$30/hr |
1/4hr Minimum Charge. Actual time thereafter. |
IR Vase | $20/hr | $40/hr | 1/4hr Minimum Charge. Actual time thereafter. |
VASE Spectroscopic Ellipsometer |
$20/hr |
$40/hr |
1/4hr Minimum Charge. Actual time thereafter. |
CASI |
$40/hr |
$80/hr |
1/4hr Minimum Charge. Actual time thereafter. |
SOC | $20/hr | $40/hr | 1/4hr Minimum Charge. Actual time thereafter. |
Perkin Elmer FTIR | $20/hr | $40/hr | 1/4hr Minimum Charge. Actual time thereafter. |
Zygo MST Interferometer | $20/hr | $40/hr | 1/4hr Minimum Charge. Actual time thereafter. |
Nanoscribe Professional GT Nano 3D Printer | $50/hr | $100/hr | 1/4hr Minimum Charge. Actual time thereafter. |
Staff Assistance/Admin Support/ Technical Consultation | $60/hr | $120/hr | N/A |
* Qunitel 4000 Mask Aligner - Exotic Resist Extra Charge.
** MicroAutomation 1100 Dicing Saw - Special Blades for Exotic Materials Extra.
*** Dimension 3100 NanoScope AFM - Excessive Probe Usage Extra Charge.