Rates List
Date Modified: November 1st, 2018
Payment Schedule: University will invoice Client periodically for services performed. The client must pay University within thirty (30) days of the date of the invoice.
| Tool | Academic Rate | Industrial/External Rates | Notes |
|---|---|---|---|
| General Cleanroom (Entrance Fee – per person) | $30/day | $60/day | 5 Day Cap/Calendar Month |
| STS ICP Etching (Si, Oxide, III/V) | $40/hr | $80/hr | 1/4hr Minimum Charge. Actual time thereafter. |
| STS PECVD (Si02, Si3N4, Oxynitirde | $50/hr | $100/hr | 1/4hr Minimum Charge. Actual time thereafter. |
| GCA Stepper | $40/hr | $80/hr | 1/4hr Minimum Charge. Actual time thereafter. |
| Solaris RTA Thermal Annealer | $20/hr | $40/hr | 1/4hr Minimum Charge. Actual time thereafter. |
| AJA Sputtering | $30/hr | $60/hr | Noble Metals Extra Charge (Au, Pt, Ag) |
| Lesker E-Beam Evaporator | $30/hr | $60/hr | Noble metals extra charge (Au ,Pt, Ag) |
| Raith E-Beam System (Writing & Imaging) | $40/hr | $80/hr | 1/4hr Minimum Charge. Actual time thereafter. |
| Qunitel 4000 Mask Aligner | $35/hr | $70/hr | 1/4hr Minimum Charge. Actual time thereafter.* |
| K&S Wire Bonder | $20/hr | $40/hr | 1/4hr Minimum Charge. Actual time thereafter. |
| Loomis Scribe & Break Tool | $20/hr | $40/hr | 1/4hr Minimum Charge. Actual time thereafter. |
| MicroAutomation 1100 Dicing Saw | $30/hr | $60/hr | 1/4hr Minimum Charge. Actual time thereafter.** |
| Fintech Flip Chip Bonder | $20/hr | $40/hr | 1/4hr Minimum Charge. Actual time thereafter. |
| K&S Digital Wedge Bonding System | $20/hr | $40/hr | 1/4hr Minimum Charge. Actual time thereafter. |
| PANalytical X-Ray Diffractometer (XRD) | $25/hr | $50/hr | 1/4hr Minimum Charge. Actual time thereafter. |
| JEOL 6400 SEM with EDAX | $40/hr | $80/hr | 1/4hr Minimum Charge. Actual time thereafter. |
| Dimension 3100 NanoScope AFM | $20/hr | $40/hr | 1/4hr Minimum Charge. Actual time thereafter.*** |
| Olympus 3D Confocual Microscope | $15/hr | $30/hr | 1/4hr Minimum Charge. Actual time thereafter. |
| IR Vase | $20/hr | $40/hr | 1/4hr Minimum Charge. Actual time thereafter. |
| VASE Spectroscopic Ellipsometer | $20/hr | $40/hr | 1/4hr Minimum Charge. Actual time thereafter. |
| CASI | $40/hr | $80/hr | 1/4hr Minimum Charge. Actual time thereafter. |
| SOC | $20/hr | $40/hr | 1/4hr Minimum Charge. Actual time thereafter. |
| Perkin Elmer FTIR | $20/hr | $40/hr | 1/4hr Minimum Charge. Actual time thereafter. |
| Zygo MST Interferometer | $20/hr | $40/hr | 1/4hr Minimum Charge. Actual time thereafter. |
| Nanoscribe Professional GT Nano 3D Printer | $50/hr | $100/hr | 1/4hr Minimum Charge. Actual time thereafter. |
| Staff Assistance/Admin Support/ Technical Consultation | $60/hr | $120/hr | N/A |
* Qunitel 4000 Mask Aligner – Exotic Resist Extra Charge.
** MicroAutomation 1100 Dicing Saw – Special Blades for Exotic Materials Extra.
*** Dimension 3100 NanoScope AFM – Excessive Probe Usage Extra Charge.