Rates List

Rates List

Date Modified: November 1st, 2018

Payment Schedule: University will invoice Client periodically for services performed. The client must pay University within thirty (30) days of the date of the invoice.

Rates List

Tool

Academic Rate

Industrial/External Rates

Notes

General Cleanroom (Entrance Fee - per person)

$30/day

$60/day

5 Day Cap/Calendar Month

STS ICP Etching (Si, Oxide, III/V)

$40/hr

$80/hr

1/4hr Minimum Charge.  Actual time thereafter.

STS PECVD (Si02, Si3N4, Oxynitirde

$50/hr

$100/hr

1/4hr Minimum Charge.  Actual time thereafter.

GCA Stepper $40/hr $80/hr 1/4hr Minimum Charge.  Actual time thereafter.

Solaris RTA Thermal Annealer

$20/hr

$40/hr

1/4hr Minimum Charge.  Actual time thereafter.

AJA Sputtering

$30/hr

$60/hr

Noble Metals Extra Charge (Au, Pt, Ag)

Lesker E-Beam Evaproator

$30/hr

$60/hr

Noble metals extra charge (Au ,Pt, Ag)

Raith E-Beam System (Writing & Imaging)

$40/hr

$80/hr

1/4hr Minimum Charge. Actual time thereafter.

Qunitel 4000 Mask Aligner

$35/hr

$70/hr

1/4hr Minimum Charge. Actual time thereafter.*

K&S Wire Bonder

$20/hr

$40/hr

1/4hr Minimum Charge. Actual time thereafter.

Loomis Scribe & Break Tool

$20/hr

$40/hr

1/4hr Minimum Charge. Actual time thereafter.

MicroAutomation 1100 Dicing Saw

$30/hr

$60/hr

1/4hr Minimum Charge. Actual time thereafter.**

Fintech Flip Chip Bonder

$20/hr

$40/hr

1/4hr Minimum Charge. Actual time thereafter.

K&S Digital Wedge Bonding System

$20/hr

$40/hr

1/4hr Minimum Charge. Actual time thereafter.

PANalytical X-Ray Diffractometer (XRD)

$25/hr

$50/hr

1/4hr Minimum Charge. Actual time thereafter.

JEOL 6400 SEM with EDAX

$40/hr

$80/hr

1/4hr Minimum Charge. Actual time thereafter.

Dimension 3100 NanoScope AFM

$20/hr

$40/hr

1/4hr Minimum Charge. Actual time thereafter.***

Olympus 3D Confocual Microscope

$15/hr

$30/hr

1/4hr Minimum Charge. Actual time thereafter.

IR Vase $20/hr $40/hr 1/4hr Minimum Charge. Actual time thereafter.

VASE Spectroscopic Ellipsometer

$20/hr

$40/hr

1/4hr Minimum Charge. Actual time thereafter.

CASI

$40/hr

$80/hr

1/4hr Minimum Charge. Actual time thereafter.
SOC $20/hr $40/hr 1/4hr Minimum Charge. Actual time thereafter.
Perkin Elmer FTIR $20/hr $40/hr 1/4hr Minimum Charge. Actual time thereafter.
Zygo MST Interferometer $20/hr $40/hr 1/4hr Minimum Charge. Actual time thereafter.
Nanoscribe Professional GT Nano 3D Printer $50/hr $100/hr 1/4hr Minimum Charge. Actual time thereafter.
Staff Assistance/Admin Support/ Technical Consultation $60/hr $120/hr N/A

 * Qunitel 4000 Mask Aligner - Exotic Resist Extra Charge.
** MicroAutomation 1100 Dicing Saw - Special Blades for Exotic Materials Extra.

*** Dimension 3100 NanoScope AFM - Excessive Probe Usage Extra Charge.