Tools & Equipment located in the Optical Laboratories and Clean Room
Lithography
- The Raith 150 E-beam Lithography System
- Quintel Mask Alignment System
- Laurell Spin Processor
- Brewer Science Spin Processor
- Brewer Science Hot Plate
Materials Deposition and Etching
- Rapid Thermal Process System
- AJA Sputtering Tool
- AJA Ion Mill System
- III-V ICP System
- AOE Dielectric Etch System
- ASE ICP Deep Silicon Etch System
- PECVD
- Lesker Evaporator
Packaging
- Dicing Saw MicroAutomation
- Flip Chip Bonder
- Scribe and Break Tool
- Wire Bonder K&S
- Digital Wedge Bonding System K&S
Imaging and Characterization
- X-Ray Diffraction (XRD)
- JEOL SEM w/EDAX
- Veeco Nanoscope IV SPM Controller
- VASE Research Spectroscopic Ellipsometer
- Olympus Microscope MX51
- Olympus Microscope OLS4000
- Raith SEM
- Omicron STM/AFM System
- Tektronix Semiconductor Parameter Tester
- Spectrometer, Ocean Optics
- STN Probe Station
Metrology
- Fisba Interferometer
- Veeco Inferometer
- Zygo Inferometer
- Alpha Step Surface Profiler
- Interferometer, "Morti"
Networking and Fiber Optics
- End and Edge Polishing Systems
- Luna Optical Backscatter Reflectometer
- Luna Benchtop Optical Vector Analyzer
- Agilent All Parameter Test Station 81910A
- Movaz DWDM
- EXFO Optical Time Domain Reflectometer
Fusion Splicing:
Fiber Termination & Inspection:
- Optical Fiber Polishing Machine
- Seiko Fiber Polisher
- Westover Video Fiber Microscope
- Agilent All Parameter Test Station
- Norland Connect-Chek 6000
Fiber Lensing Polishing System:
Fiber Alignment and Mounting:
Laser Facility
- Laser Facility Fiber Laser Modules
- Continum Nd YAG Laser
- Continum Panther Oscillator
- Continum Minilite II Nd YAG Laser
- Spectra-Physics Tsunami
Biologics Characterization
Simulation and Modeling
- EM Photonic Workstation
- Rsoft
- FemLab
- FDTD